Makina a CNC a Semiconductors:
Kupanga Zinthu Molondola Kwambiri Pachimake pa Chip Revolution
M'ndandanda wazopezekamo
SinthaniChifukwa Chake Makina a CNC Akukhalabe Ofunika Kwambiri mu Semiconductor
- Kuvuta kwambiri kwa geometric: Zigawo zambiri zimakhala ndi njira zovuta zoziziritsira mkati, mabowo apamwamba, makoma opyapyala, ndi mawonekedwe ovuta a 3D omwe ndi ovuta kapena osatheka kupanga pogwiritsa ntchito njira zopangira, zopangira, kapena zowonjezera.
- Kusiyanasiyana kwa zinthu: Zipangizo za semiconductor zimagwiritsa ntchito aluminiyamu, chitsulo chosapanga dzimbiri (300-series, 316L, 17-4PH), titaniyamu, mkuwa, zoumbaumba (Al₂O₃, AlN, SiC), invar, ndi superalloys. CNC imatha kugwira zonsezi.
- Kulekerera kolimba kwambiri: Kusalala kwa 1–5 µm m'mimba mwake wa 450 mm, malo a dzenje ±2 µm, kukhwima kwa pamwamba Ra < 0.1 µm, ndi kufanana < 2 µm ndizofala.
- Kugwirizana kwa vacuum ndi plasma: Zigawo ziyenera kukhalabe ndi fluorine kapena chlorine plasma yoopsa, vacuum yochuluka kwambiri (10⁻⁹ mbar), ndi kutentha kuyambira -100 °C mpaka >800 °C popanda kutulutsa mpweya kapena kupanga tinthu tating'onoting'ono.
- Kukonza ndi kukonzanso: Zigawo zambiri (monga kukonzanso chuck electrostatic) zimakonzedwanso mobwerezabwereza, kuphimbidwanso, ndikubwezeretsedwanso kuntchito - njira yokhazikika yokha ndi njira zochotsera.
Zigawo Zofunika Zopangidwa ndi CNC Machining
1. Zipinda Zotsukira ndi Mafelemu Aakulu Omangidwa
2. Magawo a Wafer ndi Magawo a Reticle
3. Ma Electrostatic Chucks (ESC)
4. Ma Showerheads ndi Mphete Zogulitsira Gasi
5. Zigawo ndi Zoyikapo Zowala
Zipangizo Zogwiritsidwa Ntchito mu Semiconductor CNC Machining
1. Ma aluminiyamu a aluminiyamu
2. Ma Aloyi Osakula Kwambiri
3. Magalasi a Ziwiya ndi Magalasi Aukadaulo
- Silikoni carbide yolowetsedwa ndi silicon (SiSiC)
- Kabide ya silikoni yolumikizidwa ndi reaction-bonded (RBSC)
- Magalasi okulitsa otsika kwambiri a Zerodur® (Schott) ndi ULE® (Corning)
- Aluminiyamu nitride (AlN) ndi alumina (Al2O3) ya ma chucks a electrostatic
Zipangizo zosweka izi zimafuna njira zapadera za CNC: makina opangira ma ultrasound, kugaya kwa ductile, kapena makina othandizidwa ndi laser.
4. Zitsulo Zoyera Kwambiri
Molybdenum, tungsten, ndi titaniyamu zimagwiritsidwa ntchito pazinthu zomwe zimakhudzidwa ndi plasma ya fluorine. Zitsulo zotsutsa izi zimafuna makina olimba a CNC okhala ndi mphamvu zambiri komanso zida zopangira diamondi ya polycrystalline (PCD).
Zigawo Zapadera za Semiconductor Zopangidwa ndi CNC Machining
chigawo chimodzi | Nkhani Yodziwika | Zofunikira zofunika | Zitsanzo za Kulekerera |
|---|---|---|---|
Ma chucks a Wafer (ESC) | Alumina, AlN | Kusalala < 3 µm, Ra < 0.05 µm, kutayikira kwa helium < 10⁻⁹ | Malo a dzenje la ±2 µm |
Mabafa / Ma mbale a gasi | Anodized Al, 316L SS | Mabowo 5000–20,000 Ø0.3–1.0 mm, malo a ±5 µm | < Ra 0.4 µm |
Makoma a chipinda chotsukira mpweya | 6061-T6, 5083 Al | Yolumikizidwa + yopangidwa ndi makina, yolimba kuti isatuluke ndi helium | Kusalala < 50 µm kupitirira 2 m |
Misonkhano ya ma elekitirodi | OFHC mkuwa, molybdenum | Kuwongolera kwa RF, njira zoziziritsira | Malo a njira ya ±10 µm |
Misonkhano ya pini yokweza | Zosapanga dzimbiri zophimbidwa ndi ceramic | Kukana kuvala, kuwongolera tinthu tating'onoting'ono | Kukhazikika kwa mtunda < 5 µm |
Mafelemu a kapangidwe ka nyumba (EUV) | Invar 36, ma alloys otsika a CTE | Kukhazikika kwa kutentha < 50 ppb/K | Kulondola kwa malo ± 15 µm |
Mphete zoyang'ana, mphete za m'mphepete | Silikoni, khwatsi, SiC | Kukana kukokoloka kwa plasma | Kulekerera kwa mbiri ±10 µm |
Miyeso Yolondola ndi Metrology
mbali | Kulekerera kwanthawi zonse | Njira Yoyesera |
|---|---|---|
Kusalala (pamwamba pa 300 mm) | 0.5–2 µm PV | Interferometry (Fizeau, Zygo) |
Kufanana | 1-5 µm | Magawo amagetsi + interferometry |
Malo a dzenje (mabowo zikwizikwi) | ±2–5µm | Makina oyezera a Coordinate (CMM) |
Pamapeto pake | Ra 0.025-0.1 µm | Interferometry yoyera |
Malo ozizira a njira | ±10µm | Kuyeza kwa CT kapena ultrasound |
Kusintha kwa Zida za Makina a CNC pa Ntchito ya Semiconductor
1. Nyengo ya zaka za m'ma 1990 mpaka 2000
2. Zaka za m'ma 2010: Magawo a Air-Bearing ndi Magnetic Levitation
3. Mkhalidwe Wapano (2020–2025)
- Makina a Moore Nanotechnology ndi Precitech single-point diamondi otembenuza zinthu pogwiritsa ntchito magalasi a EUV
- Malo opangira ma micromachining a Kern Microtechnik ndi Yasda akukwaniritsa kulondola kwa mawonekedwe a 100 nm
- Mndandanda wa DMG MORI ULTRASONIC wa zoumbaumba
- Fanuc ROBONANO α-NMiA: 0.1 nm programming resolution ndi 1 nm positioning resolution
- Masitolo olamulidwa ndi kutentha amasungidwa pa ± 0.01 °C okhala ndi maziko odzipatula ogwedezeka
Mavuto ndi Kusankha Zipangizo
1. Aluminiyamu Aloyi
2. Zitsulo zosapanga dzimbiri
3. Zoumba
4. Ma Alloys Otsika a CTE
5. Zitsulo Zosagwira Ntchito
Njira Zofunikira Zopangira Machining
1. Makina Othamanga Kwambiri (HSM) a Aluminiyamu
SLiwiro la pindle 20,000–42,000 rpm, zida zolinganiza za PCD kapena single-crystal diamondi, kuziziritsa kwa mist, ndi ma algorithms owonera patsogolo amalola kumaliza kofanana ndi galasi (Ra < 4 nm) mu pass imodzi.
2. Kukonza Zida Zopangira Ma Ceramics
Mwa kusunga kuya kwa kudula pansi pa malire ofunikira (nthawi zambiri < 1 µm), zinthu zosweka zimatha kupangidwa munjira yodulira pogwiritsa ntchito zida zakuthwa kwambiri za diamondi, ndikupanga malo abwino kwambiri osasweka.
3. Kutembenuka kwa Daimondi-Point Imodzi (SPDT)
6.4 Waya EDM ndi Sinker EDM
5. Kupanga Zowonjezera + Zochotsera Zosakaniza Zosakanikirana
Zofunikira za CNC Zolondola Kwambiri ndi Zolondola Kwambiri
- Kulondola kwa malo: ±2–5 µm pa ulendo wa 500–2000 mm
- Kubwerezabwereza: < 1 µm
- Kumaliza kwa pamwamba: Ra 0.025–0.1 µm pamalo omwe akuyang'ana plasma
- Kusalala: 1–3 µm pamwamba pa Ø300–450 mm
- Kufanana/kukhazikika: < 3 µm
- Malo opangira makina okhala ndi ma axis 5 kapena ngakhale ma axis 8 (monga Yasda, Makino, DMG MORI, Kern, Liechti)
- Ma spindle opangidwa ndi madzi kapena mpweya omwe amayenda pa liwiro la 20,000–60,000 rpm
- Makina okhazikika a kutentha amasunga kutentha kwa makina mkati mwa ± 0.1 °C
- Kufufuza pamakina ndi zida za laser zokhala ndi resolution ya 0.1 µm
- Maziko a granite kapena polymer-concrete okhala ndi kugwedezeka kogwira ntchito
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Advanced Machining Techniques
1. Makina Othamanga Kwambiri (HSM) ndi Zida Zing'onozing'ono
2. Akupanga-Assisted Machining
3. Kutembenuka kwa Daimondi-Point Imodzi (SPDT)
4. Kupukuta kwa 5-Axis Mogwirizana kwa Ma Geometries Ovuta
5. Njira Zophatikiza Zowonjezera ndi Zochotsera
Metrology ndi Chitsimikizo Cha Ubwino
- Zeiss Prismo kapena Leitz PMM-C ma CMM olondola kwambiri okhala ndi kusatsimikizika kwa ±0.3 µm
- Zygo GPI kapena 4D Technology phase-shifting interferometers kuti zikhale zosalala
- Ma interferometer oyera a Bruker a malo a Ra < 50 nm
- Kuyesa kutayikira kwa helium mass-spectrometer kufika pa 10⁻¹⁰ mbar·L/s
- Kusanthula kwa Mpweya Wotsalira (RGA) pambuyo pa 150 °C kuphika kuti kutsimikizire kutuluka kwa mpweya < 10⁻⁹ Torr·L/s/cm²
- Kuwerengera tinthu tating'onoting'ono kudzera pa kauntala wa tinthu tating'onoting'ono tamadzimadzi (LPC) kapena chojambulira tinthu ta laser pambuyo poyeretsa ndi ultrasound
Kukonza ndi Kukonza Zipinda Zotsukira
- Bullen Ultrasonics (USA)
- Malo oyeretsera a Tyrolit CNC (Austria)
- Chipinda chotsukira makina ochapira bwino cha Canon's Utsunomiya (Japan)
- Madzi a DI opanikizika kwambiri + kugwedezeka kwa megasonic
- Kuyeretsa mankhwala m'njira zambiri (SC-1, SC-2, piranha)
- Kuwumitsa ndi kuuma kwa N₂ koyera kwambiri
- Kuphika mu vacuum pa kutentha kwa madigiri 150–200 Celsius
- Matumba awiri m'matumba otsukidwa ndi N₂
Phunziro la Nkhani: Kupanga mbale ya EUV Wafer Stage Baseplate
- Zipangizo: SiSiC ceramic, 900 × 800 × 100 mm
- Kufunika kwa kusalala: < 1 µm PV pamwamba ponse
- Ma njira 120 ozizira ophatikizidwa, mainchesi 3 mm, malo a ±15 µm
- Zoyikapo 600 zokhala ndi ulusi (zopepuka za helium ya M4)
- Malo omaliza: ozungulira mpaka Ra < 50 nm
- Kupanga kobiriwira kwa chopanda kanthu cholumikizidwa ndi reaction-bonded
- Kulowa kwa silicon ndi chithandizo cha kutentha
- Kupera koyipa pa malo opangira makina a 5-axis
- Kupera kwa Ductile-regime ndi kuya kwa 1 µm kwa kudula
- Kumaliza kwa Magnetorheological (MRF) pokonza mawonekedwe omaliza
- Metrology pa Zygo VeriFire MST 600 mm aperture interferometer
- Kugundana komaliza ndi dzanja ngati pakufunika